Vacuum technology. Standard methods for measuring vacuum-pump performance - Turbomolecular vacuum pumps Ingestion-build-156411 Software identification tags for items

Software identification tags for items other than software

BS IEC 61584 may be applied to performance characteristics of equipment to measure any such quantity

which are not covered by this European Standard

for these products safety is a prime concern

This will allow more compact data representations

Vacuum technology. Standard methods for measuring vacuum-pump performance - Turbomolecular vacuum pumps Ingestion-build-156411 Software identification tags for items1 Scope This document, in conjunction with ISO 213601, specifies methods for the measurement of performance characteristics of turbomolecular vacuum pumps. It is applicable to all sizes and all types of turbomolecular vacuum pumps, including those with mechanical or magnetic bearings; with or without an additional drag stage(s) or other pumping stages on the shaft; with one or more inlet ports. Since turbomolecular vacuum pumps are backed by primary