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Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE Basic principles and uncertainties
Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE Basic principles and uncertainties
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Description
Basic principles and uncertainties
Constructional requirements
Electromagnetic compatibility (EMC) - Part 6-1: Generic standards – Immunity for residential
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13 Safety in use
Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators LONG_TITLE Basic principles and uncertaintiesWhat is this standard about? This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.
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