Novellus Systems 97-3856 DCE Tube Clean Mod Upgrade Kit with MFC & Hardware New img{max-width:100%} Varian Semiconductor VSEA F5428001

img{max-width:100%} Varian Semiconductor VSEA F5428001 Digital Main Controller PCB Rev

Part No: 04-143748-01 Model No:

Inventory # A-14147

Model No: RLIOP-I/F

Part No: 851-9953-003

Novellus Systems 97-3856 DCE Tube Clean Mod Upgrade Kit with MFC & Hardware New img{max-width:100%} Varian Semiconductor VSEA F5428001Novellus Systems 97 3856 DCE Tube Clean Mod Upgrade Kit with MFC & Hardware New Inventory # CONF 1101 Part No: 97 3856 Model No: KIT,UPGRADE,DCE TUBE CLEAN MOD Kit Includes Part No: 23 2661, UNIT UFC 8100 Mass Flow Controller, 8100 102369 This Novellus Systems 97 3856 DCE Tube Clean Mod Upgrade Kit with MFC & Hardware is new surplus. The physical condition is great. Sale Details Item Condition: New, 90 Day Warranty Estimated Packed Shipping