P02800 - SEMI P28 - 集積回路製造用オーバーレイ計測テストパターン StdPbc-0516 It applies to PV Si

It applies to PV Si wafers that are marked with one of the marks as described in SEMI PV29 and SEMI PV32

SEMI E39 —Object Services Standard: Concept

resist developers

3D angular luminance uniformity

approval requirements

P02800 - SEMI P28 - 集積回路製造用オーバーレイ計測テストパターン StdPbc-0516 It applies to PV SiNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Micropatterning Committee2007425global Audits and Reviews Subcommittee20076www. semi. org1996 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met.