S02100 - SEMI S21 - 人員防護安全基準 Revision:SEMI S21-1106E - Superseded This Guide describes the engineering

This Guide describes the engineering and component requirements for a UPW system used in semiconductor manufacturing

この文書は，レチクルおよびその他のEESアイテムを使用，あるいは生産する人員へのガイドとして，装置の設計からテストまでの期間に装置製造業者のために使用することが出来る。

1-1015 — Specification for Cluster Tool Module Interface 300 mm: Transport Module End Effector Exclusion Volume

SEMI E62 — Provisional Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)

SEMI E133-0318 (technical revision)

S02100 - SEMI S21 - 人員防護安全基準 Revision:SEMI S21-1106E - Superseded This Guide describes the engineeringFPD This safety guideline was technically approved by the global Environmental Health & Safety Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 24, 2006. It was available at www. semi. org in October 2006. Originally published October 2003. E This standard was editorially modified in February 2007 to correct an error. Changes were made to 7. 2. 3. This safety guideline identifies preferred