E05400 - SEMI E54 - Specification for Sensor/Actuator Network volume-C Appropriate information is summarized in

Appropriate information is summarized in § 5

This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31

The purpose of this Document is to define a method for testing filters or gas systems being considered for installation into a high-purity gas distribution system or on semiconductor manufacturing equipment

Automated-shippable door as described in ¶ 5

A notch ground into the edge of the wafer at a specified orientation provides a positive method for such alignment

E05400 - SEMI E54 - Specification for Sensor/Actuator Network volume-C Appropriate information is summarized inThis Specification provides the structure of SEMIs Sensor Actuator Network (SAN) Standard. It provides the definition for interoperability with respect to SEMI SAN Standard compliant Sensor Actuator devices. This Standard specifies how devices interoperate on a network as part of the control system for equipment. This Specification, which is the root of the SAN Standard, defines the relationships of each of the other Specifications that are components