E03400 - SEMI E34 - Safety Guideline for Mass Flow Device Removal and Shipment StdTpc-Electronic Data Interchange SEMI E88-0302 (technical revision)

SEMI E88-0302 (technical revision)

A standardization of the communication concept between FMCS and FPUs will support FPU manufacturers

7-0304E (editorial revision)

注意：　本文書は，編集上の修正を伴い，再承認された。

and Korean

E03400 - SEMI E34 - Safety Guideline for Mass Flow Device Removal and Shipment StdTpc-Electronic Data Interchange SEMI E88-0302 (technical revision)NOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Safety Guideline provides procedures to reduce the risk associated with removing, shipping, and receiving mass flow devices that have been exposed to hazardous materials. This Safety Guideline is intended to: Encourage