M05700 - SEMI M57 - Specification for Silicon Annealed Wafers StdPbc-0220 SEMI E87 — Specification for

SEMI E87 — Specification for Carrier Management (CMS)

SEMI E122-0703 (Reapproved 1109)

transportation

The scope is limited to defining the key EQIPs and their linking to process program parameters

SEMI MF1763-0318 (technical revision)

M05700 - SEMI M57 - Specification for Silicon Annealed Wafers StdPbc-0220 SEMI E87 — Specification forA number of device manufacturers utilize silicon annealed wafers to gain improved device characteristics. This Specification provides information for developing specifications for silicon annealed wafers used to fabricate semiconductor devices and integrated circuits. This Specification covers dimensional, electrical, chemical, and structural properties of silicon annealed wafers for 180 nm, 130 nm, 90 nm, (Table R1 1), 65 nm, 45 nm, 32 nm, (Table R1