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M03200 - SEMI M32 - Guide to Statistical Specifications StdTpc-Package Test Methods SEMI PV13-0714 (Reapproved 0121)
M03200 - SEMI M32 - Guide to Statistical Specifications StdTpc-Package Test Methods SEMI PV13-0714 (Reapproved 0121)
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Description
SEMI PV13-0714 (Reapproved 0121)
해당 버전의 출판은 2012년 12월 20일 Global Audits and Reviews Subcommittee에 의해 승인되었다
SEMI F81 — Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Applications
fluidized bed processes
This Document references SEMI E78
M03200 - SEMI M32 - Guide to Statistical Specifications StdTpc-Package Test Methods SEMI PV13-0714 (Reapproved 0121)This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published September 1998; previously published July 2004. Specifications are based on requirements negotiated between trading partners. This document describes an explicit specification form that defines
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