S01200 - SEMI S12 - 設備除污基準 Revision:SEMI S12-0211 - Superseded High-Speed SECS Message Services (HSMS)

High-Speed SECS Message Services (HSMS) provides a means for independent manufacturers to produce implementations which can be connected and interoperate without requiring specific knowledge of one another

Parameters such as edge length and diagonal of a wafer appear to be obvious

moisture ingress from non-sealed edge)

This Safety Guideline provides a method for selecting the size FLD for an application

SEMI PV65-0715 (Reapproved 0121)

S01200 - SEMI S12 - 設備除污基準 Revision:SEMI S12-0211 - Superseded High-Speed SECS Message Services (HSMS)2010122120112www. semiviews. orgwww. semi. org199820093 : (transferor)(transferee) (ESH) Referenced SEMI Standards SEMI S2 Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S16 Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life