MS01000 - SEMI MS10 - Test Method to Measure Fluid Permeation Through MEMS Packaging Materials StdVol-Flat Panel Display SEMI S2-1016a (delayed revision)

SEMI S2-1016a (delayed revision)

Therefore means are required to uniquely define the measurement parameters

using a short baseline drawn between 1040 cm1 and 1160 cm1 to reduce the uncertainties due to perturbations in the IR absorption at the end-point regions of longer baselines that arise from effects other than absorption by interstitial oxygen

In neither case shall the gas be considered as of higher quality than that defined by the specification

lubricants

MS01000 - SEMI MS10 - Test Method to Measure Fluid Permeation Through MEMS Packaging Materials StdVol-Flat Panel Display SEMI S2-1016a (delayed revision)1 Purpose 1. 1 Microelectromechanical systems (MEMS) are miniaturized systems requiring packaging for environmental protection and for interaction with the external environment. While there is a wide range of MEMS devices, a fairly common need is for packaging that allows movement of some of the internal subcomponents of the device during operation. This is in contrast to the typical integrated circuit that requires only that the device be protected