M01400 - SEMI M14 - Specification for Ion Implantation and Activation Process for Semi-Insulating Gallium Arsenide Single Crystals Revision:SEMI M14-89 - Inactive org in May 2015

org in May 2015

This Standard applies to "Specifications for Dimension of Components for Surface Mount Gas Distribution Systems" (SEMI F82

この文書は，SEMI E43および静電気を測定するその他の方法を参照している。

およびSEMI E142

This Standard specifies the tool side of the interface between a process or metrology tool and a front-opening box

M01400 - SEMI M14 - Specification for Ion Implantation and Activation Process for Semi-Insulating Gallium Arsenide Single Crystals Revision:SEMI M14-89 - Inactive org in May 2015The purpose of this document is to present a process for ion implantation, activation, and measurement of the resulting layers so that meaningful comparisons can be made between various lots of semi insulating GaAs. This test will be performed by the supplier so that product may be represented in a standard way. Referenced SEMI Standards None.