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M06300 - SEMI M63 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様 Revision:SEMI M63-0306 - Superseded This Specification may be applied

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This Specification may be applied to manufacturing process

All such fields can potentially generate electrical stress within an EES item

color appearance model) in this Standard

equipment for different substrate sizes will become simpler

within semiconductor device manufacturing facilities

M06300 - SEMI M63 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様 Revision:SEMI M63-0306 - Superseded This Specification may be appliedglobal Compound Semiconductor Materials Committee2006116global Audits and Reviews Subcommittee20062www. semi. org20063CD ROM E20068R2 2 Referenced SEMI Standards None.

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