Horiba STEC Z500 Mass Flow Controller MFC SEC-Z522MGN SEC-Z512MG Lot of 8 Spare Novellus Systems Part No: 22-175532-00

Novellus Systems Part No: 22-175532-00

Part No: PFM711S-02L-D-M

but may show wear from the deinstallation procedure

This unit was removed from a Hitachi S-9380 SEM

Inventory # 18589

Horiba STEC Z500 Mass Flow Controller MFC SEC-Z522MGN SEC-Z512MG Lot of 8 Spare Novellus Systems Part No: 22-175532-00Horiba STEC Z500 Mass Flow Controller MFC SEC Z522MGN SEC Z512MG Lot of 8 Spare Part No: Z500 Interface: 9 Pin D Fitting: Surface Mount CE Marked May Require Calibration Reseller Lot of 8 Made in Japan Included Components Part No: SEC Z522MGN, 3030 14800, 50 SLM, N2 (Qty. 2) Part No: SEC Z512MG, 3030 14636, 200 SCCM, HCl (Qty. 2) Part No: SEC Z522MGN, 3030 14869, 20 SLM, HCl Part No: SEC Z522MGN, 3030 14801, 10 SLM, H2 Part No: SEC Z512MG, 3030 14870,