E01900 - SEMI E19 - Specification for Standard Mechanical Interface (SMIF) Revision:SEMI E19-91 - Superseded polarizing film

polarizing film

Appropriate information is summarized in § 5

This Standard specifies EUV Pod for the 150 mm Extreme Ultraviolet Lithography (EUVL) reticle

This is already the case for many special purpose wafers with lower modulus of elasticity and is becoming more common in mainstream applications

This Document provides particle specification for gases

E01900 - SEMI E19 - Specification for Standard Mechanical Interface (SMIF) Revision:SEMI E19-91 - Superseded polarizing filmNOTICE: SEMI E19. 4 and SEMI E19. 5 are no longer published within the SEMI E19 family of Standards. They are each published and sold separately. This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 1216. Available at www. semiviews. org and www. semi. org in April 2017; originally published in