F00600 - SEMI F6 - Guide for Secondary Containment of Hazardous Gas Piping Systems StdPbc-0822 SEMI MF673-1105 (Reapproved 0611)

SEMI MF673-1105 (Reapproved 0611)

This reference Document is intended to outline for the user the common systems configurations

and polysulfone) commonly used individually or in assemblies to remove particles from gas lines

It has become increasingly important in semiconductor material and device manufacturing to describe

Procedure B is the conventional DLTS (Procedure A) with corrections for non-exponential transients due to heavy trap doping and incomplete charging of the depletion region

F00600 - SEMI F6 - Guide for Secondary Containment of Hazardous Gas Piping Systems StdPbc-0822 SEMI MF673-1105 (Reapproved 0611)The purpose of this document is to provide a guide for the design, fabrication, and operation of secondarily contained distribution piping for hazardous production material (HPM) gases. This guide covers the general requirements for hazardous production material distribution piping in those industries that are included under the H 6 Classification of the Uniform Building Code, or Articles 51 or 80 of the Uniform Fire Code, or of other applicable local