E07200 - SEMI E72 - 300 mm装置の床面積，高さ，重量の仕様ならびにガイド StdTpc-Stainless Steel Components a Standard for monitoring UPW

a Standard for monitoring UPW

The purpose of this Document is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment

SEMI T10-0701 (first published)

3  This Specification provides the essential dimensional and certain other common characteristics of silicon wafers

including all communications and control systems

E07200 - SEMI E72 - 300 mm装置の床面積，高さ，重量の仕様ならびにガイド StdTpc-Stainless Steel Components a Standard for monitoring UPWGlobal Physical Interfaces & Carriers CommitteeNorth American Physical Interfaces & Carriers Committee20041210North American Regional Standards Committee20052www. semi. org20053199820006 Referenced SEMI Standards SEMI E15 Specification for Tool Load Port SEMI E15. 1 Specification for 300 mm Tool Load Port