F07000 - SEMI F70 - Test Method for Determination of Particle Contribution of Gas Delivery System Revision:SEMI F70-0320 - Current SEMI MF1390 — Test Method

SEMI MF1390 — Test Method for Measuring Bow and Warp on Silicon Wafers by Automated Noncontact Scanning

SEMIスタンダード日本語翻訳版をご利用にあたっての注釈を本文の末尾に記載しております（「すべきである」「しなければならない」について等）。

2  The collection of process data during recipe execution is important to today’s factories to support various applications that help optimize equipment processes

Unpolished wafers or wafers with epitaxial films are not covered

This definition provides a standard host interface and equipment operational behavior

F07000 - SEMI F70 - Test Method for Determination of Particle Contribution of Gas Delivery System Revision:SEMI F70-0320 - Current SEMI MF1390 — Test MethodNOTICE: The designation of SEMI F70 was updated during the 0320 publishing cycle to reflect the creation of SEMI F70. 1. The purpose of this Document is to provide a standardized methodology and procedure for measuring the particle contribution performance of a gas delivery system in terms of number of particles added to gas flowing through the system. This standardized procedure is intended to be used commonly by the gas delivery system suppliers,