F03000 - SEMI F30 - 据付現場における微量ガス不純物およびパーティクルに関する精製器性能テストの始動および検証 Revision:SEMI F30-0710 - Superseded SEMI F72-0214 (Reapproved 0221)

SEMI F72-0214 (Reapproved 0221)

SEMI MF2074-0707 (technical revision)

NOTICE: This Document was completely rewritten in 2008

1 grade nitrogen and argon bulk supply gases

This Test Method determines maximum peak-to-valley of saw marks of multi or single crystal Si wafers that typically run across the entire wafer surface and along the wire direction

F03000 - SEMI F30 - 据付現場における微量ガス不純物およびパーティクルに関する精製器性能テストの始動および検証 Revision:SEMI F30-0710 - Superseded SEMI F72-0214 (Reapproved 0221)global Gases Interfaces & Carriers Committee2010430global Audits and Reviews Subcommittee20106www. semi. org1998 1001ppm101ppb50LPM Referenced SEMI Standards SEMI F58 Test Method for Determination of Moisture Dry Down Characteristics of Surface Mounted and Conventional Gas Delivery Systems by Atmospheric Pressure Ionization Mass Spectroscopy (APIMS) SEMI F68 Test Method for Determining Purifier Efficiency