E09900 - SEMI E99 - Specification for Carrier ID Reader/Writer Revision:SEMI E99-0317 - Superseded SEMI E140-1022 (technical revision)

SEMI E140-1022 (technical revision)

SEMI E116-0704 (technical revision)

the data was obtained following this Guide

100%サンプリングの要求条件は，サンプリング目的で使用される各シリンダ中のガスの総量を制限する。この制限は，低濃度レベルにおけるパーティクルサンプリングに対する統計的要求を緩和する。

including those widely used in 300 mm semiconductor factories

E09900 - SEMI E99 - Specification for Carrier ID Reader/Writer Revision:SEMI E99-0317 - Superseded SEMI E140-1022 (technical revision)The purpose of this Standard effort is to provide a common specification for concepts, behavior, and services (functions) provided by a Carrier ID Reader and a Carrier ID Reader Writer to an upstream controller. A standard interface will increase interchangeability of Carrier ID Reader Writers so that users and equipment suppliers have a wider range of choices. This Standard addresses the functional requirements for a generic Carrier ID Reader Writer