MF104800 - SEMI MF1048 - Test Method for Measuring the Reflective Total Integrated Scatter StdPbc-0118 which will

which will

disk drives

3  Specific requirements for density of selected surface defects (Table 2) and variations of layer thickness and layer net carrier density are included together with AQLs for these properties

本仕様は，その使用に関連した全ての安全問題を取り扱うことを意図していない。この仕様の使用者は，その責任において，適切な安全及び健康上の作業方法を確立し，また使用前に規制上の制限への適用性を判断するものである。

Alternative methods may be used as long as they comply with SEMI C1 guidelines for method validation

MF104800 - SEMI MF1048 - Test Method for Measuring the Reflective Total Integrated Scatter StdPbc-0118 which willThis Test Method covers the measurement of scatter signals from surfaces into most of the reflective hemispherical collector above the surface. Calculation of the TIS, called Haze in some industries, is defined. This Test Method is particularly applicable to clean, optically smooth, front surface reflectors, such as semiconductor wafers, computer disk substrates, and mirrors, because under certain conditions the measured signals can be related to