MF156900 - SEMI MF1569 - Guide for Generation of Consensus Reference Materials for Semiconductor Technology Revision:SEMI MF1569-94 (Reapproved 1999) - Superseded This Document accomplishes this by

This Document accomplishes this by defining an operational model for AMHS SEM equipment as viewed by a factory automation controller (Host)

and Safety Guideline for Manufacturing Equipment Decontamination

The actual footprint may vary by equipment type

SEMI D20 — Terminology for FPD Mask Defect

This Guide can be applied to inline equipment as well as batch equipment

MF156900 - SEMI MF1569 - Guide for Generation of Consensus Reference Materials for Semiconductor Technology Revision:SEMI MF1569-94 (Reapproved 1999) - Superseded This Document accomplishes this byThis Guide covers the steps to be taken to generate a set of ConRefs for a specific property or family of related properties required in semiconductor technology. The procedure for generating the set of ConRefs is based on interlaboratory testing in accordance with ASTM E691. It is assumed for the purposes of this Guide that the test method evaluated by the interlaboratory study (ILS) is appropriate for determining the property values of the ConRef.