F01700 - SEMI F17 - Specification for High Purity Quality Electropolished 316L Stainless Steel Tubing, Component Tube Stubs, and Fittings Made from Tubing Lang-Chinese (Simplified) SEMI E94-0312 (technical revision)

SEMI E94-0312 (technical revision)

SEMI MF1569-0307 (Reapproved 1023)

SEMI E76 — Guide for 300 mm Process Equipment Points of Connection to Facility Services

SEMI F61-0301 (Reapproved 0309)

本法は，ふっ素樹脂製チューブフィッティングに損傷を生じさせるに必要な内部圧力を決定するための標準手順を規定する。

F01700 - SEMI F17 - Specification for High Purity Quality Electropolished 316L Stainless Steel Tubing, Component Tube Stubs, and Fittings Made from Tubing Lang-Chinese (Simplified) SEMI E94-0312 (technical revision)This specification was technically reapproved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on October 25, 2002. Initially available at www. semi. org December 2002; to be published March 2003. Originally published in 1995. NOTICE: This document was balloted and approved for withdrawal in 2004. The purpose of this