E05411 - SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices Revision:SEMI E54.11-0316 - Superseded the XML represents the content

the XML represents the content

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The scope is limited to defining the key EQIPs and their linking to process program parameters

An EPT state model that defines triggers for state changes

E05411 - SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices Revision:SEMI E54.11-0316 - Superseded the XML represents the contentNOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately. This Specification is part of a suite of Standards that specify the implementation of SEMI Standards for the Sensor Actuator Network. The specific purpose of this Specification is to describe a network independent application model comprised of device objects that are common to all endpoint devices (EPD) on a semiconductor equipment