E03500 - SEMI E35 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment Revision:SEMI E35-0200 - Superseded This overview Guide provides process

This overview Guide provides process development

NOTICE: This Document was balloted and approved for withdrawal in 2012

or SEMI M24

through the oxide layers

SEMI M57-1011 (technical revision)

E03500 - SEMI E35 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment Revision:SEMI E35-0200 - Superseded This overview Guide provides processThe purpose of this Guide is to provide standard cost of ownership (COO) metrics for evaluating unit production cost effectiveness of manufacturing equipment in the semiconductor and related industries. This Guide establishes a procedure to facilitate an understanding of equipment related costs, including costs related to environmental, health, and safety (EHS) factors, by providing definitions, classifications, algorithms, methods, and example values