M04400 - SEMI M44 - シリコン中の酸素の換算係数ガイド StdTpc-Stainless Steel Components Application of this Test Method

Application of this Test Method is expected to yield comparable data among filters or gas systems

It is a Guide for establishing optimum electrostatic compatibility of the handling environment for reticles and other items that are extremely electrostatic sensitive (EES) to electrostatic charge

and completion of automated and manual carrier transfers to and from the equipment and

SEMI MF1811-1109 (technical revision)

SEMI E113-0306 (technical revision)

M04400 - SEMI M44 - シリコン中の酸素の換算係数ガイド StdTpc-Stainless Steel Components Application of this Test Methodglobal Silicon Wafer Committee20101221global Audits and Reviews Subcommittee20112www. semiviews. org www. semi. org2001320053 1107 cm 1IOC 88 1,2 1970 Referenced SEMI Standards SEMI M59 Terminology for Silicon Technology SEMI MF1188 Test Method for Interstitial Atomic Oxygen Content of Silicon by Infrared Absorption with Short Baseline