G03100 - SEMI G31 - Test Method for Determining the Abrasive Characteristics of Molding Compounds StdTpc-Molding Compounds The purpose of this Document

The purpose of this Document is to outline the test method for electronic pressure transducers used in gas delivery systems for semiconductor processing

SEMI E126-0308 (technical revision)

orgで入手可能となる。初版は2001年発行。前版は2006年11月発行。

To order more than one license

SEMI G21-84 (first published)

G03100 - SEMI G31 - Test Method for Determining the Abrasive Characteristics of Molding Compounds StdTpc-Molding Compounds The purpose of this DocumentThis document describes the method to measure the abrasive characteristics of molding compounds by measuring mold orifice weight loss as a function of molded volume. Referenced SEMI Standards None.