E13800 - SEMI E138 - Specification for XML Semiconductor Common Components Revision:SEMI E138-0709 - Superseded This Guide provides recommendations for

This Guide provides recommendations for equipment static charge limits that are appropriate for the product being manufactured

current/voltage

It provides the definition for interoperability with respect to SEMI SAN Standard-compliant Sensor/Actuator devices

This Test Method is reproducible and provides a metric (i

SEMI C29-0301 (technical revision)

E13800 - SEMI E138 - Specification for XML Semiconductor Common Components Revision:SEMI E138-0709 - Superseded This Guide provides recommendations forThis Document is a central location for the definition of common XML elements that are not specific to a single standard, but common across multiple standards. This Document defines the representation of Error, Data Types, Data Value Types, and Unit which are considered common components. The common components are used in association with other XML documents or schemas generated as part of the XML based SEMI Standard Interface Specifications.