PV09100 - SEMI PV91 - Specification for Trichlorosilane Used in Polysilicon Production Revision:SEMI PV91-1019 - Current The registrant or the credit

The registrant or the credit card holder must make all refund requests

7-0698 (first published)

SEMI E1-1110 (technical revision)

The measured optical characteristics are appropriate for the practical operational conditions using as an extended source

It is intended for use by manufacturers and purchasers

PV09100 - SEMI PV91 - Specification for Trichlorosilane Used in Polysilicon Production Revision:SEMI PV91-1019 - Current The registrant or the creditThe purpose of this Document is to provide specifications for different grades of trichlorosilane that are used in polysilicon industry. With the growth of the photovoltaic market, the customers demand for quality of polysilicon is extremely high. Trichlorosilane is one of the critical raw materials of polysilicon production. The impurity content in trichlorosilane may directly impact the quality of polysilicon. The standard for trichlorosilane is to