F01000 - SEMI F10 - フッ素樹脂製チューブフィッティングに損傷を生じさせるのに必要な内部圧力を決定するためのテスト方法 StdTpc-Photolithography Metrology Subordinate Standards (included):

Subordinate Standards (included):

ボトムカセットIDタグ領域（オプション）　（1）

備註：本安全基準中以「註」為標題的段落並非正式內容，不得以此修改或取代正式的安全基準。

6 — Particle Specification for Grade 10/0

2 Ωcm for n-type silicon (refer to SEMI MF43)

F01000 - SEMI F10 - フッ素樹脂製チューブフィッティングに損傷を生じさせるのに必要な内部圧力を決定するためのテスト方法 StdTpc-Photolithography Metrology Subordinate Standards (included):NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. SI