E09400 - SEMI E94 - Specification for Control Job Management StdTpc-Lead Finishes and sequence of SECS-II messages

and sequence of SECS-II messages

1  This Standard specifies the classes that suppliers are to use to describe essential data

The specifications and the associated test procedures are guidelines based on the experience of suppliers and users

regulators

org in August 2017

E09400 - SEMI E94 - Specification for Control Job Management StdTpc-Lead Finishes and sequence of SECS-II messages* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1