E03900 - SEMI E39 - 객체 서비스 표준: 컨셉트, 동작, 서비스 Revision:SEMI E39-0703 (Reapproved 1109) - Superseded The purpose of this Standard

The purpose of this Standard is to define a test method for the determination of the outgassing organic contamination from minienvironments used for storage and transport of wafers using gas chromatography/mass spectroscopy (GC/MS)

本仕様は，Global Physical Interfaces & Carriers Committeeで技術的に承認されたもので，North American Physical Interfaces & Carriers Committeeが直接責任を負うものである。現版は2004年12月10日North American Regional Standards Committeeにて承認されている。2005年2月にまずwww

services and behaviors described for the VPD are either required or optional for each pump type

which is determined by the amount of moisture taken up by the system and subsequently released in any exposure after receipt

SEMI E143-0306 (Reapproved 0518)

E03900 - SEMI E39 - 객체 서비스 표준: 컨셉트, 동작, 서비스 Revision:SEMI E39-0703 (Reapproved 1109) - Superseded The purpose of this StandardGlobal Information & Control Committee , 2009 9 4 Global Audits and Reviews Subcommittee . 1995 , 2003 7 . www. semi. org . (Object Services Standard (OSS)) , . . (Standard) . (Standard) public , . (Standards) , (Object Services) . . (Standards) , (Standards) . Subordinate Document: SEMI E39. 1 0703 (Reapproved 1109) SECS II Protocol for Object Services Standard (OSS) Referenced SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2 Message