MF139100 - SEMI MF1391 - Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared Absorption Revision:SEMI MF1391-1107 (Reapproved 1023) - Current SEMI E84-0701 (technical revision)

SEMI E84-0701 (technical revision)

SEMI F81-0624 (technical revision)

1-0698 (Reapproved 0615)

The physical and chemical parameters include hardness

本スタンダードは，the Information & Control Global Technical Committeeで技術的に承認されている。現版は2015年2月10日， global Audits and Reviews Subcommitteeにて発行が承認された。2015年6月にwww

MF139100 - SEMI MF1391 - Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared Absorption Revision:SEMI MF1391-1107 (Reapproved 1023) - Current SEMI E84-0701 (technical revision)This reference Test Method covers the determination of substitutional carbon concentration in single crystal silicon. Because carbon may also reside in interstitial lattice positions when in concentrations near the solid solubility limit, the results of this Test Method may not be a measure of the total carbon concentration at such concentrations. The useful range of carbon concentration measurable by this Test Method is from the maximum amount of