G06700 - SEMI G67 - Test Method for the Measurement of Particle Generation from Sheet Materials Revision:SEMI G67-0996 (Reapproved 1104) - Superseded and transparent conductive films

and transparent conductive films

The MSEM consists of equipment characteristics and behaviors that are applicable to this class of equipment and are required to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities

SEMI E157-1125 (technical revision)

SEMI MF110-00a (first SEMI publication)

This Document defines relation with main part of SEMI E54 including Common Device Model (CDM) and existing Specific Device Models (SDMs)

G06700 - SEMI G67 - Test Method for the Measurement of Particle Generation from Sheet Materials Revision:SEMI G67-0996 (Reapproved 1104) - Superseded and transparent conductive filmsNOTICE: This Document was reapproved with minor editorial changes. This Test Method describes a procedure to measure particles on sheet materials. The method described may be used for the measurement of particles on items such as: Leadframe Interleaves, Cleanroom Paper, and Packing Material. The procedures may be used by the material manufacturer for quality control or by a customer at incoming inspection. Referenced SEMI StandardsNone.