MS00600 - SEMI MS6 - Guide for Design and Materials for Interfacing Microfluidic Systems StdTpc-Scanning Surface Inspection Systems reticle inspection

reticle inspection

SEMI E28 — Guideline for Pressure Specifications of the Mass Flow Controller

SEMI D36 — Terminology for LCD Backlight Unit

SEMI F15 — Test Method for Enclosures Using Sulfur Hexafluoride Tracer Gas and Gas Chromatography

orgで入手可能になり，2003年7月発行に至る。初版は1992年発行。

MS00600 - SEMI MS6 - Guide for Design and Materials for Interfacing Microfluidic Systems StdTpc-Scanning Surface Inspection Systems reticle inspectionThis standard was technically approved by the global MEMS Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on December 20, 2007. It was available at www. semi. org in February 2008. This document provides guidelines for general fluidic interface design and materials selection that can reduce redundant engineering effort and lead to improved design, manufacturability, and operation. Referenced SEMI