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Electronic Materials Forecast Service StdVol-MEMS SEMI M83 — Test Method

$11000.00

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SEMI M83 — Test Method for Determination of Dislocation Etch Pit Density in Monocrystals of III-V Compound Semiconductors

SEMI PV81-0318 (first published)

SEMI MF1048-87 (Reapproved 1999) (first SEMI publication)

[Single edition]

本仕様は，150 mm/200 mmのポッドについて，ハンドルの寸法と配置を定める。これらは，自動操作であるが，手動操作も考慮している。個々の手動ハンドルの設計は，この基準の寸法的な制限内で完成させることは自由である。

Electronic Materials Forecast Service StdVol-MEMS SEMI M83 — Test MethodSemi annual service that provides a 5 year forecast for lithography, advanced deposition, formulated cleans and CMP consumables. Provided in EXCEL format.

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