MF072800 - SEMI MF728 - Practice for Preparing an Optical Microscope for Dimensional Measurements Revision:SEMI MF728-1106 (Reapproved 1111) - Superseded SEMI M31-0303 (technical revision)

SEMI M31-0303 (technical revision)

The rinse test method evaluates performance in a flushing mode while the component is in a static state (no actively moving components within the component under test)

The orientation of a wafer flat is the orientation of the surface of the flat (on the edge of the wafer)

The Document defines the view of the equipment through the SECS communications link

SEMI E113-1101 (first published)

MF072800 - SEMI MF728 - Practice for Preparing an Optical Microscope for Dimensional Measurements Revision:SEMI MF728-1106 (Reapproved 1111) - Superseded SEMI M31-0303 (technical revision)Dimensional measurements made with an optical microscope are made on the optical image of the specimen and not directly on the specimen itself. The method of illuminating the specimen affects the image content, including the appearance of edges which are used in defining the size of the specimen. This Practice includes adjusting the microscope for Kohler illumination, which provides uniform illumination of the specimen, reduces stray light, and